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AluminumThin film Surface roughnesssubstrate temperatureMagnetron sputteringAFM (1)
Atomic force microscopy, fourier transforms, power spectral density, surface roughness, thin films (1)
Atomic Force, Power Spectral Density (1)
coolant types (1)
Cutting fluids (1)
hardness (1)
Intermetallic phases (1)
Microstructure (1)
morphology (1)
Recycled Wear (1)
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