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Fabrication of the photo-resist mask onto 3D nonplanar wafer for micro abrasive jet machining planar wafer for micro abrasive jet machining
Byiringiro, Jean Bosco
;
T. J., Ko
;
Kim, Ho-Chan
;
Lee, In Hwan
(
Proceedings of the 2012 Mechanical Engineering Conference on Sustainable Research and Innovation
,
2012-05-03
)
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Author
Byiringiro, Jean Bosco (1)
Kim, Ho-Chan (1)
Lee, In Hwan (1)
T. J., Ko (1)
Subject
EPON SU-8 epoxy resin, micro-stereolithography, photo-resist mask, 3D non-planar wafer (1)
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Date Issued
2012 (1)
Has File(s)
No (1)