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Browsing Academic Research Papers by Subject "EPON SU-8 epoxy resin, micro-stereolithography, photo-resist mask, 3D non-planar wafer"

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Title: Fabrication of the photo-resist mask onto 3D nonplanar wafer for micro abrasive jet machining planar wafer for micro abrasive jet machining Author: Byiringiro, Jean Bosco; T. J., Ko; Kim, Ho-Chan; Lee, In Hwan Date: 2012-05-03

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