Abstract:
In this work, an advanced analysis of Cu/Fe NPs thin films using atomic force
microscopy (AFM) has been discussed to characterize at nanoscale 3-D surface microtexture.
Samples of Cu/Fe thin films were fabricated by Direct Current-Magnetron Sputtering
technique with two controlled thicknesses (group I: Cu 55 nm/Fe 55 nm and group II: Cu 55
nm/Fe 70 nm) in specific conditions of pressure and power. The results obtained from
experimental measurements suggested that the surface of group I has the lowest values for
fractal dimension (D = 2.28 ± 0.01) and root mean square height (Sq = 4.40 ± 0.1 nm); while
the highest values for fractal dimension (D = 2.31 ± 0.01) and root mean square height (Sq =
4.67 ± 0.1 nm) were found in group II. Stereometric and fractal analyses applied for thin films
are modern tools for accurate quantitative morphometric characterisation.