Abstract:
In this work, aluminum thin films were sputtered on steel substrates at a varying
substrate temperature ranging between 40 and 100 degrees Celsius. The films were
characterized for microstructure by field emission scanning electron microscope,
topography by atomic force microscope, mechanical properties by nanoindentation and
the results related to the wear behavior of the films under very high sliding load of 30
N. The mechanism of failure of such films were observed and the relationship between
the substrate temperature and sliding failure discussed. The study is important in
understanding the failure mechanisms and improvement of the surface properties of
sputtered aluminum thin films.
