dc.description.abstract |
Laser micromachining has been widely applied in the
fabrication, production and manufacturing of Micro Electro Mechanical Systems (MEMS). It uses photo thermal melting or ablation to
fabricate a microstructure. The use of heat as a means of material
removal has various negative effects on different materials. Distortion
of the material is one of the negative effects, especially polymers.
Polymers are often used in medical devices, microelectronic and
sensor industries where high precision and high quality is required.
During laser cutting of polymers, bulges are formed mainly due
to resolidification of molten material in the working zone and
temperature difference between the heat affected zone and the heat
unaffected zone.
A mathematical model has been developed using finite element
analysis to model polymer material behavior during laser cutting.
The model was run on both FEMLAB and MATLAB softwares. The
effects of cutting parameters on bulge formation was then be analyzed
and the results compared to theoretical structures |
en_US |