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Fabrication of the photo-resist mask onto 3D nonplanar wafer for micro abrasive jet machining planar wafer for micro abrasive jet machining

Byiringiro, Jean Bosco; T. J., Ko; Kim, Ho-Chan; Lee, In Hwan (Proceedings of the 2012 Mechanical Engineering Conference on Sustainable Research and Innovation, 2012-05-03)

Now showing items 1-1 of 1

Author
- Byiringiro, Jean Bosco (1)
- Kim, Ho-Chan (1)
- Lee, In Hwan (1)
- T. J., Ko (1)
Subject
- EPON SU-8 epoxy resin, micro-stereolithography, photo-resist mask, 3D non-planar wafer (1)
- ... View More
Date Issued
- 2012 (1)
Has File(s)
- No (1)