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Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials

Byiringiro, Jean Bosco; Ko, Tae Jo; Kim, Ho-Chan; Lee, In Hwan (INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2013-11)

Now showing items 1-1 of 1

Author
- Byiringiro, Jean Bosco (1)
- Kim, Ho-Chan (1)
- Ko, Tae Jo (1)
- Lee, In Hwan (1)
Subject
- Mask hardness, Surface profile of the mask, SU-8 photoresist, 3-D freeform brittle materials (1)
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Date Issued
- 2013 (1)
Has File(s)
- Yes (1)